Particle monitoring
Non-destructive particle monitoring
PARTi provides a complete solution for non-destructive surface particle monitoring of consumables, parts, and cleanroom apparel.
Features
- Non-destructive testing of particle levels on various materials and parts
- Displays particles from 100 nm to 25 µm
- Monitors particle-count evolution as a function of time
- Cleanliness monitoring of parts and materials
- Only clean air and electricity required for operation
- Electropolished stainless-steel chamber
Monitor surface particles
- Silicon wafers
- Disk holders
- Carriers
- Plastic cassettes, trays, and other parts
- Cleanroom garments
- Cleanroom consumables
Dimensions
- Chamber: 420 mm × 420 mm × 420 mm (opening 280 mm × 240 mm)
- Overall: 1,550 mm (H) × 1,300 mm (W) × 500 mm (D)
